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ZILM——D33 piezoelectric coefficient measuring instrument helps achieve new breakthroughs in piezoelectric material research

On December 30, 2024, the internationally top-tier journal 《Nature Communications》 published an article titled "High Piezoelectric Property with Exceptional Stability in Self-Poled Ferroelectric Films." Notably, the ZMPiezo-P d33 piezoelectric coefficient measurement instrument, independently developed by our company ZILM, served as a crucial tool for the research team to measure the d33 coefficient of piezoelectric materials under temperature variations, owing to its outstanding performance and superior quality. The instrument demonstrated three key features in the study:
1. High-precision measurement of piezoelectric coefficients for piezoelectric ceramics and thin-film materials
Our company's d33 piezoelectric coefficient measuring instrument differs from traditional instruments. Based on the definition of piezoelectric coefficients, it utilizes the direct piezoelectric effect to obtain the material's piezoelectric coefficients by measuring the applied force and the generated electrical signal. Therefore, it is not limited by material types and can be used for measuring piezoelectric coefficients of both ceramic bulk materials and thin-film materials.
In the article, the research team first measured the same piezoelectric ceramic piece using traditional ceramic measurement instruments and our company's instruments. As shown in the figure below, the results from both instruments were consistent.
The research team further utilized the inverse piezoelectric effect, measuring the d33 piezoelectric coefficients of thin-film materials with varying thicknesses via a laser scanning vibrometer (LSV), thereby validating the rationality of our company's instrument for thin-film material measurements.
This follows our previous 《Nature Communications》 paper ("A method for quantitatively separating the piezoelectric component from the as-received 'Piezoelectric' signal"), which demonstrated the high accuracy of our company's instrument measurements through comparison with theoretical results. Now, through comparisons with various commercial instruments using different measurement methods, it further proves the validity of our company's instrument measurements.
2. Variable-temperature in-situ testing
Our company's ZMPiezo-P d33 piezoelectric coefficient measuring instrument supports in-situ measurements at variable temperatures ranging from -150°C to 550°C, providing technical support for systematic analysis of piezoelectric coefficient variations with temperature. In the article, the research team used this equipment to conduct variable-temperature in-situ measurements on piezoelectric thin-film materials within the range of 25°C to 400°C, with results shown in the figure below. These results provided key data support for the article's conclusions.
3. Visualized operation interface
Our company's D33 piezoelectric coefficient measuring instrument is equipped with "intelligent integrated" computer software. The user-friendly visualized operation interface facilitates control of measurement conditions, provides timely and intuitive feedback of measurement results, and assists researchers in quickly analyzing material properties.
The D33 piezoelectric coefficient measuring instrument independently developed by our company is not only a high-performance scientific research instrument, but its simple operation mode and large-sized sample stage can also provide key technical support for the development of new industrial products such as piezoelectric materials in MEMS devices and wearable smart devices.

Foshan Zilm Technology Co.,LTD.
Professional piezoelectric film materials and technology solutions provider
Website：https://www.zilm-tech.com
Telephone（CN）：0757-86707059

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2 months ago (edited) | [YT] | 1

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International authoritative journals verify the leading performance of ZILM's d33 piezoelectric coefficient measuring instrument

On March 16, 2022, the internationally authoritative scientific journal 《Nature Communications》 published a paper titled "A method for quantitatively separating the piezoelectric component from the as-received 'Piezoelectric' signal." The article proposed the use of the CBA method to extract piezoelectric signals from mixed signals and compared this method with the conventional DE method, as well as our company's (ZILM) d33 piezoelectric coefficient measuring instrument and the OS method, which can be regarded as a standard. The results showed that the d33 values were 33.74 pC/N for the CBA method, 32.64 pC/N for the DE method, 33.05 pC/N for our company's d33 piezoelectric coefficient measuring instrument , and 33.20 pC/N for the OS method. From the results, we can see that the deviation for DE was 0.56, for CBA it was 0.54, while the deviation for our company's d33 piezoelectric coefficient measuring instrument was only 0.15, significantly outperforming the DE and CBA methods.
The D33 piezoelectric coefficient measuring instrument independently developed by ZILM can more effectively detect the piezoelectric coefficient characteristics of piezoelectric materials (including piezoelectric ceramics and piezoelectric thin film materials). It also comes with computer measurement software that matches the instrument, allowing for more intuitive viewing of measurement results and more convenient customization of measurements according to user needs. Additionally, this measuring instrument has received high recognition from research institutions such as Shanghai Jiao Tong University, Nanjing University of Science and Technology, Shanghai Normal University, and industry clients. It can be widely used for the evaluation and measurement of piezoelectric materials (piezoelectric thin films, polymers), ferroelectric materials, and related device performance.
ZILM is a professional supplier of piezoelectric film materials and technology solutions. The company's products can be widely used in high-precision technology fields such as sensors, micro-actuators, infrared detection, and energy harvesting, with particularly broad application prospects in markets like smart wearables, medical and health care, green energy, automotive, and electronic components for mobile phones. With internationally leading R&D and production technologies, ZILM can better help users achieve their technical goals, while striving to become a trusted supplier and industry leader for customers.

Foshan Zilm Technology Co.,LTD.
Professional piezoelectric film materials and technology solutions provider
Website：https://www.zilm-tech.com
Telephone（CN）：0757-86707059

2 months ago (edited) | [YT] | 1

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Pulse wristband made of ZILM flexible piezoelectric film



The concept of pulse is believed to be familiar to everyone, and many have experienced counting heartbeats through pulse. Theoretically, pulse refers to the periodic and rhythmic pulsation of pressure within the arteries, and this cyclical signal is known as the pulse wave. The pulse wave contains a wealth of information about the human body, which is expressed through waveform, intensity, rate, and rhythm.
How is the pulse wave measured?
Currently, the vast majority of wearable heart rate monitoring devices on the market utilize the PPG (Photoplethysmography) method, which is relatively convenient in terms of measurement and usage. However, its performance in measurement accuracy and stability often leaves much to be desired. The primary sources of error stem from various interferences, such as light interference caused by movement, ambient light interference, skin tone interference, frequency crossover interference, and variability in vascular structure at the measurement site. In contrast, the pressure sensing method is less affected by environmental factors but requires highly sensitive pressure or strain sensors, along with good flexibility to ensure proper contact with the measurement point, as well as filtering algorithms to mitigate motion interference.
ZILM's independently developed flexible piezoelectric film features high sensitivity, easy processing, ultra-thinness, ultra-lightweight, excellent temperature stability, and superior flexibility, achieving the perfect combination of ultra-high sensitivity and ultra-flexibility for strain sensors. When applied to pulse monitoring, it can provide precise data and has been integrated into a wristband form, enabling 24-hour real-time pulse data acquisition via smartphones.
What is the use of obtaining accurate pulse wave data?
1. Blood pressure measurement
By analyzing the characteristic parameters of the pulse wave waveform and performing a series of mathematical calculations, the blood pressure value of the human body can be determined.
2. Arteriosclerosis detection
According to the Moens-Korteweg equation, PWV is directly proportional to the square root of the elastic coefficient. When arteriosclerosis reduces vascular elasticity, the propagation speed of the pulse wave in the arterial system increases. Therefore, the degree of arteriosclerosis in patients can be determined based on the obtained baPWV.
3. Sleep monitoring
Measures pulse waves to obtain the user's heart rate, then combines the heart rate waveform data with motion sensors that monitor body movement. It uses automatic sleep detection technology to determine whether the user has entered a sleep state and analyzes sleep quality.
4. Alcohol Detection
By measuring the wearer's pulse wave signal, performing periodic segmentation and feature point extraction on the signal, then establishing a pulse wave-specific standard template and calculating its energy distribution, key parameters in the energy domain are obtained. By comparing these parameters with those of the pre-drinking human pulse wave signal-specific standard template, it can determine whether the wearer has consumed alcohol and track the drinker's status.
5. TCM Pulse Diagnosis
By using strain sensors to detect pulse signals at the three positions of the radial artery (cun, guan, and chi), mimicking the finger techniques of TCM physicians, and following the diagnostic process of lifting, pressing, and searching, a pulse monitor collects pulse wave patterns at eight different pressure levels. By analyzing the position, frequency, shape, strength of the pulse, and various parameters of the pulse graph, the pulse waves can be classified into the 28 fundamental pulse types in TCM.



Foshan Zilm Technology Co.,LTD.
Professional piezoelectric film materials and technology solutions provider
Website：https://www.zilm-tech.com
Telephone（CN）：0757-86707059

2 months ago | [YT] | 1

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Performance description of piezoelectric film materials

The properties of piezoelectric thin film materials include the following points:
1. Dielectric constant
Although piezoelectric thin films are single-crystal films or preferentially oriented polycrystalline films, the atomic packing within them is not as dense and ordered as in crystals, resulting in differences between the dielectric constant values of piezoelectric films and those of crystals. In addition, factors such as the often significant residual internal stresses commonly found in thin films and measurement-related reasons also contribute to the discrepancy between the dielectric constant values of thin films and the corresponding values of crystals.
Studies have shown that the dielectric constant of piezoelectric thin films is not only related to the crystal orientation but also depends on the testing conditions. The significant dispersion in the dielectric constant of piezoelectric thin films is attributed not only to differences in internal stress magnitude and testing conditions but also to deviations from the stoichiometric ratio in the film composition and variations in film thickness. It is generally believed that the dielectric constant of thin films decreases as the thickness reduces. Additionally, the dielectric constant of piezoelectric thin films undergoes noticeable changes with variations in temperature and frequency.
2. Volume resistivity
From the perspective of reducing the dielectric loss and relaxation frequency of piezoelectric thin films, it is desirable to have a high resistivity, with at least ρv ≥⁸ Ω•cm. The resistivity of AlN thin films ranges from 2×10¹⁴ to 1×10¹⁵ Ω•cm, far exceeding 10⁸ Ω•cm, making AlN an excellent thin film in this regard. Additionally, the conductivity of AlN piezoelectric thin films follows the 1nσ ∝ 1/T relationship with temperature.
Crystals exhibiting the piezoelectric effect lack a center of symmetry, resulting in anisotropic electron mobility and varying conductivity. The conductivity of AlN piezoelectric thin films along the C-axis direction differs from that perpendicular to the C-axis, with the former being approximately 1-2 orders of magnitude lower.
3. Loss tangent
The dielectric loss tangent (tanδ) of AlN piezoelectric thin films ranges from 0.003 to 0.005, while that of ZnO thin films is relatively larger, ranging from 0.005 to 0.01. The reason why these thin films exhibit such high tanδ values is that, in addition to the conduction process, there are also significant relaxation phenomena present in these films.
Similar to dielectric thin films, the tanδ of piezoelectric thick films gradually increases with rising temperature and frequency as well as increasing humidity. Additionally, tanδ tends to increase when the film thickness decreases. Clearly, the rise in tanδ with temperature is due to increased conductivity and more relaxation particles, while its increase with frequency results from more relaxation events occurring within a given time period.
4. Breakdown strength
Since the breakdown field strength of dielectrics is a strength parameter, and various defects are inevitable in thin films, the breakdown field strength of piezoelectric thin films exhibits considerable dispersion. According to dielectric breakdown theory, for flawless thin films, the breakdown field strength should gradually increase as the film thickness decreases. However, in reality, due to the presence of numerous defects in thin films, the influence of defects becomes more pronounced as the thickness decreases. Consequently, when the thickness is reduced to a certain value, the breakdown field strength of the film instead drops sharply. In addition to the intrinsic properties of the thin film itself, the breakdown field strength is also affected by the influence of electrode edges during testing. As the film thickness increases, the electric field at the electrode edges becomes more non-uniform, leading to a gradual decrease in the breakdown field strength with increasing film thickness.

Foshan Zilm Technology Co.,LTD.
Professional piezoelectric film materials and technology solutions provider
Website：https://www.zilm-tech.com
Telephone（CN）：0757-86707059

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ZILM-PZT piezoelectric thin film application in PMUT medical imaging

Recently, a team from a key laboratory at Fudan（CN） University published a research report titled "Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array" on a scientific journal website. The report demonstrates that by adding a backing layer with PDMS (polydimethylsiloxane) as the substrate material to PMUT (piezoelectric micromachined ultrasonic transducers), the device's bandwidth can be doubled without altering the component size. Piezoelectric thin-film materials are the core components of PMUT devices, and the piezoelectric thin-film material used in this research experiment was provided by our company—Zhuomo Technology Co., Ltd. The R&D team at Zhuomo Technology deposited "electrode material (Ti/Pt)" and "PZT (lead zirconate titanate) piezoelectric thin film" on the silicon-based substrate they provided. The PZT piezoelectric thin film deforms and generates ultrasonic pulses when electrified, a property leveraged in the experiment. In this experiment, the device was tested using a 30 V pulse lasting 10 ns, achieving a resonant frequency of 19.0 MHz in air. The PZT piezoelectric thin film exhibited excellent stability, high voltage resistance, and high responsiveness in the experiment.
Current research findings indicate that PMUT imaging offers greater advantages compared to traditional B-mode ultrasound imaging. Conventional B-mode ultrasound requires applying lubricant to eliminate air between the device and the skin, features a large single probe that necessitates back-and-forth scanning, whereas PMUT, utilizing multi-array technology, eliminates air interference for direct use. PMUT probes are smaller, multiple in number, and require only a single scan for completion, making the process faster and more time-efficient. Additionally, PMUT can be developed into handheld wireless devices, with images directly transmitted to smartphones or other devices, offering a more convenient and rapid transmission mode. PMUT equipment is smaller than traditional B-mode ultrasound, consumes less power, and is more portable, enhancing overall convenience. It holds promising development prospects for the future. Zhuomo Technology can provide materials and technical support for PMUT.

Foshan Zilm Technology Co.,LTD.
Professional piezoelectric film materials and technology solutions provider
Website：https://www.zilm-tech.com
Telephone（CN）：0757-86707059

Below is the PMUT multi-array diagram excerpted from Figure 3 of the original text.

2 months ago (edited) | [YT] | 1

Zilm

ZILM Dual Rail Dicing Machine: Your Ideal Silicon Wafer Cutting Assistant

In the R&D field of the semiconductor industry, cutting silicon wafers is a common yet critical task. However, researchers often encounter various issues during the cutting process, such as poor cutting quality, hand-contact contamination of materials, and time-consuming labor. These problems not only affect the quality of silicon wafers and increase material costs but may also hinder project progress efficiency. In response to the demands of researchers from universities and research institutes, ZILM has launched this dual-rail scribing machine, which helps solve silicon wafer cutting challenges easily at a relatively low cost.


1. Product parameters
The ZILM double-rail scribing tool consists of accessories such as cutting blades, guide rails, rulers, material platform plates, and base plates. It comes in two sizes: 270*300mm and 500*430mm, corresponding to maximum cuttable material sizes of 6 inches and 12 inches respectively. The ruler's minimum graduation is 1mm. For the cutting head, options include diamond, tungsten steel alloy, or tungsten steel alloy rollers, suitable for cutting various materials such as silicon wafers, wafers, and glass.

2. Product Features
(1). Innovative dual-guide rail for more precise cutting
The ZILM laboratory sample divider adopts an innovative dual-rail design, ensuring uniform force distribution on the connecting rod and smooth movement. This minimizes blade wobble during cutting, guaranteeing stability and precision. Additionally, the dual-rail design enhances cutting speed, facilitates smoother operation, and maintains material cutting quality.
(2). The blade is highly hard and sharp, providing a smoother cut
The cutter head is made of high-quality diamond/tungsten steel alloy, ensuring smooth and efficient cutting. The blade edge is extremely sharp, highly hard, sturdy, and wear-resistant, with a long service life. The cutting process is completed in one go, leaving a neat and smooth incision, which brings great convenience to research and development work.
(3). Simple structure, easy tool replacement
In response to the actual needs of R&D personnel, our company has optimized the wafer dicing machine. The cutter fixture features a simple structural design, allowing easy replacement by simply loosening screws, eliminating cumbersome operations. Simultaneously, we have opted for high-quality, non-customized branded cutting tools that offer superior quality and greater versatility, enabling customers to easily purchase replacements widely available on the market. This reduces usage anxiety caused by blade wear. These detailed designs fully demonstrate our commitment to user experience.
(4). Flexible cutting angle, hands-free material contact is possible

Each cutting machine is equipped with a movable material platform. Firstly, no additional backing paper is required during material cutting, effectively saving consumables. Secondly, the material board is designed to be non-fixed and can be freely moved as needed to accommodate different cutting angles. Finally, the raised right-angled edge of the material board securely holds the material in place, preventing hand contact from contaminating its surface, making the cutting process more convenient and efficient.
(5). Clear cutting contact points reduce operational errors
The carefully designed connecting rods and rotating shaft fixtures are compact in size and obstruct the view less. This makes the cutting contact points clearly visible, reducing the risk of operational errors caused by obstructed vision, thereby minimizing unnecessary waste of edge materials. It not only improves operational accuracy but also effectively reduces material costs.
(6). Patent certified, reliable quality
The ZILM dual-guide wafer dicing machine is an outstanding product that combines innovative design with practicality, and has successfully obtained utility model patent certification, which serves as authoritative recognition of our product's unique design and practical value.

3. Buying Guide
If you are interested in our partitioner, please feel free to contact us via the website phone number "ZILM" for inquiries. We will provide detailed answers to your product questions and offer professional technical support to ensure you can choose the most suitable product. Additionally, we offer comprehensive after-sales service to give you peace of mind during use.

Foshan Zilm Technology Co.,LTD.
Professional piezoelectric film materials and technology solutions provider
Website：https://www.zilm-tech.com
Telephone（CN）：0757-86707059

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